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제품소개
포토마스크(Recycle)
Contents Specification
Level 1 2 3 4 5
Address Grid Pitch 0.025㎛ 0.05㎛ 0.125㎛ 2.5㎛ 0.5㎛
CD (Critical Dimension) 1.5㎛≤ 3.0㎛≤ 6.0㎛≤ 10㎛≤ 15㎛≤
CD Tolerance ±0.15㎛ ±0.3㎛ ±0.5㎛ ±0.7㎛ ±1.0㎛
Position Accuracy ±1.0㎛ < 500 mm < ±5.0㎛
Thickness 1.6T · 2.3T · 3.0T · 5.0T ~ 10T